JPH0252253U - - Google Patents

Info

Publication number
JPH0252253U
JPH0252253U JP13246788U JP13246788U JPH0252253U JP H0252253 U JPH0252253 U JP H0252253U JP 13246788 U JP13246788 U JP 13246788U JP 13246788 U JP13246788 U JP 13246788U JP H0252253 U JPH0252253 U JP H0252253U
Authority
JP
Japan
Prior art keywords
ion source
microwave
source chamber
short sides
rectangular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13246788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13246788U priority Critical patent/JPH0252253U/ja
Publication of JPH0252253U publication Critical patent/JPH0252253U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP13246788U 1988-10-11 1988-10-11 Pending JPH0252253U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13246788U JPH0252253U (en]) 1988-10-11 1988-10-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13246788U JPH0252253U (en]) 1988-10-11 1988-10-11

Publications (1)

Publication Number Publication Date
JPH0252253U true JPH0252253U (en]) 1990-04-16

Family

ID=31389454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13246788U Pending JPH0252253U (en]) 1988-10-11 1988-10-11

Country Status (1)

Country Link
JP (1) JPH0252253U (en])

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